annealing; copper compounds; grain boundaries; indium compounds; oxidation; semiconductor growth; solar cells; specimen preparation; ternary semiconductors; thin film devices; vacuum deposition; Inlt; subgt; 2lt; /subgt; Selt; subgt; 3lt; /subgt; -CuInSelt; subgt; 2lt; /subgt; air-annealing effect; amorphous structure; chalcopyrite structure; current-voltage measurement; electrical property; external quantum efficiency measurement; grain boundary density; heterojunction solar cell device; modified 3-stage coevaporation process; oxidation; passivation; precursor film layer; size 0.5 mum to 1 mum; thin film solar cell; time 1 h; Films; Grain boundaries; Oxidation; Passivation; Photovoltaic cells; Scanning electron microscopy; Surface morphology; 3-stage process; CuInSelt; infgt; 2lt; /infgt; Oxidation;
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