In this paper, fabrication and performance of RFMEMS planar spiral inductors is presented. The fabricationprocess is simple, using surface micromachined technology withthree masks. Two types of spiral inductor were fabricated andthe measured results showed that the spiral inductors had highperformance at high frequency. The maximum quality of thespiral inductor- Type A is 15.8 at 1.4GHz with inductance of4.61nH. The maximum quality of the spiral inductor-Type B is19.7 at 4.1GHz with inductance of 1.40nH.
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