Improvement of a Micro-Beam in a Smart Gas Sensor with Resonating Mechanism

摘要

A micro-beam of a creative smart resonating gas sensor with a self-actuating and detecting (SAD) system is presented. The smart SAD sensor, in which the resonance frequency shifting of the MEMS cantilever is monitored to probe its mass change caused by adsorption of certain gas molecules, has never need exclusive detection circuits and instruments, and the micro-beam has never need additional detective MEMS structure consequently. Some design rules of the more compact micro-beam has been obtained by computer simulation analysis and related discusses. Some electrostatic driving MEMS beam has been fabricated by surface silicon micromachining and sacrificial layer process with low cost, and tested by laser vibration-meter system. An improvement of the micro-beam is introduced by comparison study of the computer simulation results and testing results of the fabricated beam.