Research about top electrode improvement of ZnO nanowires array nanogenerator

摘要

A novel method to fabricate the top electrode of ZnO nanogenerator is introduced in the article. Hydrothermal synthesis is adopted to grow ZnO nanowires array structure. And the sputtering process is employed as a simple fabrication method to form the top electrode. Scanning electron microscope (SEM) analysis has been carried out to identify different layers in nanogenerator. The energy harvesting experiment of the nanogenerator excited by ultrasonic wave has been complete as well in the research. Experiment results reveal that the maximum output voltage reaches about 0.23V.