An Ultralow-Ripple Polarization Voltage Generator based on High-Voltage Bandgap Reference for MEMS Gyroscopes

摘要

This paper proposes an ultralow-ripple direct-current (DC) bias voltage generator for the polarization requirement of high-performance MEMS gyroscopes. The generator is based on a high-voltage (HV) bandgap reference whose power supply is provided by an integrated Dickson-type DC-DC converter. The DC-DC converter can output a 25 V source with a 400 µA load current. In addition, an HV buffer is connected behind the HV bandgap reference for isolation and better driving. With a 10 pF load capacitance exhibited by the MEMS gyroscope, the post-simulated output voltage of the generator is 20 V with a ripple of 5 m Vp-p and a settling time of 13.5 µs. If the load capacitance is increased to 50 pF, the ripple is reduced to 1 mVp-p with a settling time of 16.7 µs.