CHARACTERISATION OF 10 Pa VACUUM GAUGE USING PRESSURE BALANCE

摘要

This paper presents an extended usage of gas pressure balances for measurements of pressure down to below 10 Pa. This pressure range is too low to measure by using commercial pressure balances. This is because their inability to operate at pressures below a limit determined by the mass of floating elements. Using a variable bell-jar pressure method developed at KRISS, we can overcome this pressure limit. Additionally, we investigated the lowest achievable pressure limit using commercial 133-Pa CDG (Capacitance Diaphragm Gauge).