DESIGN AND FABRICATION OF A STEP HEIGHT CERTIFICATED REFERENCE MATERIAL IN KRISS

摘要

Certificated reference material (CRM) has been used for calibration works in industry. The easy way to calibrate for reliable measurements is to compare with a CRM, which has a traceability chain from length standard. The design of a KRISS step height CRM has various patterns for checking of magnification, spherical aberration, and step height as well, which is available for multi-probe inspection machines in the manufacturing lines. The fabrication had been done by conventional optical lithography and dry etching technique with optimized conditions. In order to verify the step values, a white-light scanning interferometer was adopted with different magnification objectives. In this paper, the step values of 0.5 and 1.6 μm were realized with the standard deviation of less than 10 nm.