A More Effective Technique of Design Synthesis For MEMS with Expected Performance

摘要

A design synthesis technique based on sensitivity for Micro-Electro-Mechanical Systems (MEMS) proposed.This new technique can be called Sensitivity-Based Direct Solution Algorithm (DSA) of design synthesis for MEMS with expected performance.Design synthesis with expected performance is regarded as a reverse problem of MEMS analysis.Behavior equation group can be educed from analysis equations.This behavior equation group can be solved using any solution algorithm of non-linear equation group.Newton Iteration Method based on sensitivity is adopted.Comparing with Genetic Optimization Algorithm (GA),computational workload of DSA is greatly decreased.