Numerical μ-CMM Simulation for the Application of Monte-Carlo Methods for the Uncertainty Estimation of Measured Dimensional Parameters

摘要

In recent years METAS has developed an ultra-precise, interferometer based, micro coordinate measuring machine (μ-CMM) with a unique 3D probe head with low, isotropic probing force. This instrument exhibits a single point measurement repeatability in the range of a few nanometers, even in scanning mode [1]. Using the commercial high level software Quindos, the instrument is applied to measure complex dimensional parameters of microparts. The exact estimation of task specific measurement uncertainties is almost impossible because there are many influences such as the measurement strategy combined with the applied fitting procedures inside the high level software. The application of Monte Carlo methods offers here a simple solution to this complex problem. In this paper we present the numerical simulation model of the METAS μ-CMM and the application of Monte Carlo Methods for the uncertainty estimation of dimensional quantities of typical measurement applications.