Micro Positioning Systems for High Vacuum Applications

摘要

The handling of complex environmental conditions such as high and ultra high vacuum always is a big challenge for micro drive engineering. Especially in the field of micro drive systems these conditions call for high efforts in the choice of proper materials without outgassing behaviour. The systems' mechanical setup has to be adapted to the vacuum in order to avoid any gaseous inclusions while assembling. The design has to be realised regarding particular thermal expansions of variable materials. Finally high demands are made on the lubrication of micro drive systems for ultra high vacuum as beside the issue of outgassing it has to resist a wide range of temperature as given during bake-out.