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Analysis of Thermal Hazard and Inherent Safety for Ethylbenzene by DSC and TAM Ⅲ

机译:用DSC和TAMⅢ分析乙苯的热危害和固有安全性

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This study aimed at determining the inherent safety parameters of half-finished and finished materials of ethylbenzene, which is employed in the manufacturing process of the semiconductor industry. Through thermal scanning tests by differential scanning calorimetry (DSC), some essetial thermokinetics parameters, such as onset temperatue (TO), maximum temperature (Tmax), heat of decomposition (Hd), were obtained. Other safety parameters included temperature of no return (TNR), time to maximum rate (TMR), and self-accelerating decomposition temperature (SADT), which were acquired by thermal activity monitor Ⅲ (TAM Ⅲ). The results acquired by DSC and TAM Ⅲ not only present the thermal polymerization of ethylbenzene, but also can prevent hazards during the period of processing, storage, and transportation by appling the safety parameters.
机译:这项研究旨在确定在半导体工业制造过程中使用的乙苯半成品和半成品的固有安全性参数。通过差示扫描量热法(DSC)进行的热扫描测试,获得了一些基本的热动力学参数,例如起始温度(TO),最高温度(Tmax),分解热(Hd)。其他安全参数包括不活动温度(TNR),达到最大速率的时间(TMR)和自加速分解温度(SADT),这些参数是通过热活动监视器Ⅲ(TAMⅢ)获取的。 DSC和TAMⅢ的结果不仅反映了乙苯的热聚合反应,而且通过应用安全参数可以防止加工,储存和运输期间的危害。

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