Microfabrication and thermal behavior of miniature cesium-vapor cells for atomic clock operations

摘要

We report on the microfabrication and packaging of Cs-vapor cells filled with Ne or Ar for micro atomic clocks (MACs) based on the coherent population trapping (CPT). We present a two-step anodic bonding process to control the cell atmosphere for long-term operation of MACs. Furthermore, the results of thermal analysis of a cell embedded in the physical package are shown in order to discuss the optimal design of the package for the thermal management of the MAC.