Methodology for N recovery post PM for agedon-annealed SPA oxynitride gate without XPS referencing

摘要

In this DoE (design of experiment) study, we reported a relatively simple methodology which enables Aleris VUVSE system to well maintain the thickness and nitrogen content (N%) measurement accuracy and matching of DPN, pre and post PM (preventive maintenance) of system, via rely on monitoring of the agedon-annealed nitrided oxide samples N% correlation function, without the need to rely on the standard XPS referencing targets.