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Influence of the Laser Beam Shape and Particle Through-position in the Beam Cross-section on Light-blockage Size Measurement

机译:光束横截面中激光束形状和粒子通过位置对光阻尺寸测量的影响

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The result of the light-blockage particle size measurement varies with the laser beam shape and the particle through-position in the beam cross-section for the energy inhomogeneity. To generate the rule of this phenomenon two parameters are defined as k_a and P_((g)inc)/P_0, presenting the influence factor of the illumination nonuniformity on a particle and the percent incident energy on a particle respectively. A moving three-dimensional coordinate system is employed to simulate the moving process of particle through the detecting area. And a mathematical model applicable for the light-blockage size measurement is built and analyzed through solving integral equations. Values of the two parameters are computed and plotted against the beam shape factor, the particle radius and the particle though-position. The results indicate that the optimum ratio of the major axis to minor axis of the beam cross-section is in the interval of 1~2 and the optimal particle through-position is on the semi-axis.
机译:对于能量不均匀性,阻光粒度测量的结果会随激光束形状和光束横截面中的粒子穿透位置而变化。为了产生这种现象的规律,将两个参数定义为k_a和P _((g)inc)/ P_0,分别表示照射不均匀性对粒子的影响因子和入射能量百分数对粒子的影响。使用移动三维坐标系来模拟粒子通过检测区域的移动过程。通过求解积分方程,建立并分析了适用于挡光尺寸测量的数学模型。计算这两个参数的值,并针对光束形状因子,粒子半径和粒子通过位置进行绘制。结果表明,光束横截面的长轴与短轴的最佳比在1〜2的范围内,而粒子通过的最佳位置在半轴上。

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