Thick-Film Inclinometer Based on Free Convective Motion of an Heating Air Mass

摘要

Using thick-film technology on a ceramic substrate, a new tilt senor based on the heat transfer principle has been developed. The sensor is fabricated from ceramic materials and thick-film technology that results in an accuracy of about 2% full scale output, repeatability of about 0.2°C and thermal stability <0.2%/°C over a ±50° range. The TFT tilt sensor is capable of resolving less 0.1°. Finally, the sensor is inexpensive enough to be, in the near future, competitive with other types of commercial tilt transducer.