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POROUS SILICON SENSORS : A REVIEW ON THEIR FABRICATION AND APPLICATIONS

机译:多孔硅传感器:其制备及其应用综述

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In this work the fabrication processes and structure properties of porous silicon based sensors are reviewed and discussed. It is shown that, thanks to its full compatibility with the silicon substrate, to its very large surface area, to the simple and cheap fabrication process, porous silicon reveals good potentiality for gas sensor devices, although strong efforts have still to be done for its definitive assessment as basic material for sensors applications.
机译:在这项工作中,对多孔硅基传感器的制造工艺和结构特性进行了回顾和讨论。结果表明,由于多孔硅具有与硅衬底的完全兼容性,非常大的表面积,简单且便宜的制造工艺,因此它对于气体传感器设备具有良好的潜力,尽管仍需付出巨大的努力。最终评估是传感器应用的基础材料。

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