A precise knowledge of the Debye-Waller factors for Ni and Al, respectively, is indispensible for an accurate determination of the bonding charge density of the intermetallic phase NiAl by convergent beam electron diffraction. For liquid nitrogen temperature the Debye-Waller factors as well as an error estimate were obtained by repeated diffraction experiments in various systematic row orientations. A careful analysis of the acceptable error shows that a sufficient level of accuracy has been achieved.
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