High-speed low-loss large-fan-out optoelectronic clock distribution networks on multichip modules by using silica glass waveguides and silicon microstructures

摘要

Guided-wave optoelectronic clock distribution networks on multichip modules (MCMs) are designed and fabricated to meet the high-speed clocking requirements of next-generation digital systems through a realization of superior network bandwidth, low power consumption, and large fanout capabilities compared to electrical interconnect counterparts. The sixteen-fanout H-tree clock distribution networks on MCMs is demonstrated by combining silica glass waveguides and micromachined silicon microstructures. The proposed optoelectronic multichip modules (OE-MCMs) with silica glass networks can be fabricated in a CMOS compatible batch process without modifying the conventional IC fabrication facilities. The proposed OE-MCM assembly/packaging processes are simple and cost-effective by sing self-alignment silicon microstructures. The design issues of optoelectronic H-tree networks and micromachined alignment structures for assembly/packaging processes are presented and discussed to improve the overall system performance while minimizing the system cost. The silica glass clock distribution networks and mosaic silicon mirror arrays are characterized at wavelengths of 1310 nm and 1550 nm by measuring overall optical power losses and signal uniformity. !