Development of bimorph vibrator using lead free BNT piezoelectric film deposited by hydrothermal method

摘要

PZT piezoelectric film synthesized hydrothermally has been studied actively in our laboratory. However, it is apprehended recently that PZT affects health and the environment, because PZT is chemical compound containing lead. Therefore, we tried to synthesize lead free BNT piezoelectric film on titanium substrate hydrothermally. The synthesized BNT films on titanium substrates were evaluated with SEM image, XRD pattern and EDS. We fabricated bimorph vibrators with synthesized lead free BNT film and evaluated their performances.