Summary form only given. Various industry applications such as lasers, accelerators, plasma source ion implantations and non-thermal pollution gas treatment need high voltage high repetition rate pulsed power supplies. This paper presents a compact capacitor charging power supply for gas treatment. It consists of a three-phase rectifier with soft starting, a three phase IGBT inverter, three high frequency transformers and high voltage diode rectifiers. The IGBT based inverter utilizes series resonant technology. Hence, the power supply is highly efficient and of compact construction, as it only uses forced air-cooling. The power supply is packed in a 249/spl times/496/spl times/449(mm) steel case. It is specifically designed for constant current capacitor charging. The system efficiency is about 90% with a high power factor. The characteristics,of the power supply are as follow; Peak charging rate: 20kJ/s Output voltage: 20kV Charging capacitor: 0.25μF Repetition rate: 300pps Charging time: 2.5mS Protections: Over current, over temperature, over charging time.
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