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Fabrication of Current-Perpendicular-to-Plane Junctions Based on Fe_3Si/FeSi_2 Multilayered Films by Lift-Off

机译:剥离法制备基于Fe_3Si / FeSi_2多层薄膜的电流-垂直-平面结

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摘要

Current-perpendicular-to-plane (CPP) junctions comprising Fe_3Si/FeSi_2 multilayers were prepared by a lift-off process combined with lithography techniques. The Fe_3Si/FeSi_2 multilayered films were grown on Si (111) substrates at room temperature by facing-targets direct-current sputtering. From the X-ray diffraction measurements, it was confirmed that the Fe_3Si layers were epitaxially grown from the first layer on Si (111) up to the top layer across the FeSi_2 layers with the same orientation relationship as that in the first layer. The CPP junctions, wherein ferromagnetic interlayer coupling across the FeSi_2 spacer layers was induced, exhibited an obvious change in the electrical resistance for the current injection, which might be due to current-induced magnetization switching.
机译:通过剥离工艺与光刻技术相结合,制备了包含Fe_3Si / FeSi_2多层膜的电流垂直平面(CPP)结。 Fe_3Si / FeSi_2多层膜在室温下通过面对靶直流溅射在Si(111)衬底上生长。通过X射线衍射测量,证实Fe_3Si层以与第一层相同的取向关系从Si(111)上的第一层穿过FeSi_2层一直外延生长到顶层。引起跨FeSi_2隔离层的铁磁中间层耦合的CPP结在电流注入的电阻方面表现出明显的变化,这可能是由于电流感应的磁化转换引起的。

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    Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan;

    Mechanical Engineer Department, Kurume National College of Technology, Kurume, Fukuoka 830-8555, Japan;

    Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan;

    Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan;

    Department of Electrical Engineering, Fukuoka Institute of Technology, Fukuoka 811-0295, Japan;

    Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan;

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