APCVD preparation of TiNxOy film for multi-functional coating glass

机译：APCVD法制备多功能镀膜玻璃用TiN x O y 薄膜

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A simple atmospheric pressure chemical vapor deposition method was employed to deposit TiNxOy film on glass substrate. The obtained film combined the solar control performance and self-cleaning properties, which was suitable for multi-functional coating glass.

机译：采用一种简单的大气压化学气相沉积方法在玻璃基板上沉积TiN x O y 薄膜。所得膜兼具日光控制性能和自清洁性能，适用于多功能镀膜玻璃。

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来源
《Lasers amp; Electro Optics amp; The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09》|2009年|1-2|共2页
会议地点 Shanghai(CN);Shanghai(CN)
作者
Duan Gangfeng; Zhao Gaoling; Lin Xiaoxuan; Zhang Tianbo; Han Gaorong;
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State key laboratory of Silicon Materials Department of Material Science and Engineering, Zhejiang University, Hangzhou 310027, P. R. China;

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关键词
TiN xOy film; atmospheric pressure chemical vapor deposition; multi-functional coating glass;

机译：TiN xOy膜;常压化学气相沉积;多功能镀膜玻璃;

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APCVD preparation of TiNxOy film for multi-functional coating glass

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