Research on Nanofabrication Technology of Micro-/Nano-Stereo Rapid Prototyping of PCVD

摘要

The paper probes into the process and method of maskless plasma nanofabrication of quasimoleculernlaser, and researches into the equipment and its set technology of maskless laser plasma, starting from therncomputer control system of micro-ano-stereo rapid prototyping of plasma chemical vapour deposition (PCVD)rnand optimum technique of depositing high-rate films by PCVD. This ideal technology and equipment can greatlyrnraise the ratio of final product, protect the environment, and find wide applications.