Active Vibration Isolation of Micro-manufacturing Platform Based on Neural Network

摘要

A bionics mechanics-based structure model is constructed for the vibration isolation of micromanufacturingrnplatform. The developed active vibration isolation system consists of micro-manufacturingrnplatform, giant magnetostrictive actuators, air springs, pedestal and a rubber layer. Actuators and air springs arernarranged in parallel. The controller based on three-layer neural network is applied to realize high performance tornisolate complex micro-vibration. The absolute acceleration of the micro-manufacturing platform is used as thernperformance index of vibration control. The performance of the control system is tested by numerical simulation.rnThe simulation results show that the active vibration isolation system has good isolation performance against thernfloor disturbance and the direct disturbance acting on the micro-manufacturing platform in all the frequencyrnrange.