Structural and optical characterization of Mn doped ZnS nanocrystals elaborated by ion implantation in SiO_2

摘要

Mn doped ZnS nanocrystals have been formed in SiO_2 layers by ion implantation and thermal annealing. The structural analysis of the processed samples has been performed mainly by Secondary Ion Mass Spectroscopy (SIMS) and Transmission Electron Microscopy (TEM). The data show the precipitation of ZnS nanocrystals self-organized into two layers parallel to the free surface. First results of the optical analysis of samples co-implanted with Mn show the presence of a yellow-green photoluminescence depending on the Mn concentration and the size of the nanocrystals, suggesting the dopign with Mn of some precipitates. direct c 1999 Elsevier Science B.V. All rights reserved.