PFCs thermal decomposition using 500kw class atmospheric pressure plasma

摘要

In application of PFCs thermal decomposition using 500kw class atmospheric pressure plasma shows SF_6 gas of process efficiency decreases from average 4796ppm to average 26ppm about 99.475%. Plasma of atmosphere pressure state is judged to obtain high process efficiency. Also compact design is expected maximization at process area. In the future, PFCs thermal decomposition using 500kw class atmospheric pressure plasma will be useful to get data in semiconductor and LCD manufacture system.