'HIGH ORDER' HYBRID SENSOR MODULE BASED ON AN IDENTICAL TRANSDUCER PRINCIPLE AND STRUCTURES

摘要

A novel approach for a multifunctional sensor module using an identical transducer principle and structures for both (bio-)chemical and physical sensors is suggested. Here, the same (bio-)chemical sensor can also serve as a physical sensor, and thus, multifunctionality is achieved by means of different sensor arrangements and/or operation modes. Moreover, the module is a "high order" system, because the number of obtained (bio-)chemical and physical information can be higher than the number of the sensors needed. The system is flexible and easy exchangeable. As an example, a hybrid module for the determination of two (bio-)chemical parameters (pH, penicillin concentration) and three physical parameters (temperature, flow velocity and flow direction) is realised. An ISFET (ion-selective field-effect transistor) was used as the transducer for all sensors. With regard to practical applications, pH measurements were performed in human urine, too.