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CGH Null Test Design and Fabrication for Off-Axis Aspherical Mirror Tests

机译:用于离轴非球面镜测试的CGH空测试设计和制造

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A null-lens based on a Computer Generated Hologram (CGH) is designed to test the primary off-axis aspherical mirror of the GAIA space telescope. This custom-designed and fabricated CGH includes five zones (null CGH, alignment CGH, and beam-projection CGH) on the same substrate. The optical test configuration is simple and the designed five-zones CGHs can simultaneously provide the aberrated wavefront correction for null tests, CGH alignment with a commercial interferometer, pre-positioning of the mirror under test in a cryogenic chamber, and isolation of the diffraction orders in the test setup. Positioning of the five zones with respect to each other is extremely critical for the success of this custom-made CGH null testing. For this reason, the fringes of all five zones were manufactured on a single photolithographic mask. With INO's special micro-fabrication processes, including its photolithographic, etching, and coating technologies, this 4.5-inch in diameter CGH was successfully made. The RMS wavefront error is estimated at 7.33 nm for the fabricated null CGH.
机译:基于计算机生成的全息图(CGH)的零透镜旨在测试GAIA空间望远镜的主要离轴非球面镜。这种定制设计和制造的CGH在同一基板上包括五个区域(空CGH,对准CGH和束投影CGH)。光学测试配置简单,设计的五区CGH可以同时提供零波测试的畸变波前校正,使用商用干涉仪的CGH对准,在低温室中预先放置被测镜以及分离衍射级在测试设置中。五个区域相对于彼此的位置对于此定制CGH空值测试的成功至关重要。因此,所有五个区域的条纹均在单个光刻掩模上制造。通过INO的特殊微加工工艺(包括光刻,蚀刻和涂层技术),成功生产了这种直径4.5英寸的CGH。对于制造的空CGH,RMS波前误差估计为7.33 nm。

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