Phase Behavior of Amine with Fluorosurfant in Supercritical Carbon Dioxide

摘要

Phase behavior of the amine with the fluorosurfactant in supercritical carbon dioxide has been investigated. Amine as an additive was added to the supercritical carbon dioxide to remove completely photo resist used for Supercritical CO2 Resist Removal (SCORR) process. But Amine could separate carbon dioxide under the cloud point curve. So cloud point is a necessary factor for SCORR process. The cloud points were measured using a high pressure variable-volume view cell. All systems exhibited a lower critical solution temperature (LCST) phase behavior and became one-phase in the range of 313.15 - 353.15 K at less than 30 MPa.