Techniques for Coupled Circuit and Micromechanical Simulation

摘要

This paper details advanced simulation techniques for efficiently determining system behavior of integrated microsystems that contains both circuit elements and micromechanical ones. Techniques for building reduced-order dynamical models for coupled energy domain non-liner (both weakly nonlinear and strongly nonlinear) MEMS devices have been developed. An open-ended and expandable simulation framework that enables complete simulation of integrated microsystems is also implemented.