GEODESIC: A New and Extensible Geometry Tool and Framework with Application to MEMS

摘要

This paper will detail the capabilities of a new geometric modeling tool, called Geodesic, which is being released in source code form to the general community. In addition to providing geometric operations to create geometry useful in MEMS simulation, it uniquely offers a fully integrated 3-D levelset kernel that permits highly accurate physically based deposition and etching simulation.