Hierarchical Simulation for Microelectrofluidic System Process Performance Analysis

摘要

With the sophisticated development of microelectroflu-idic devices and systems, system performance analysis is a key for system optimization and system re-design. Due to the increasing complexity and natural characteristics of microsystems, system performance is intensly related to low-level component design and operation features. This paper presents a hierarchical modeling and simulation method for a micro chemical analysis system. Relationships between overall microsystem capacity and constitutive component performance are analyzed. The objective is to understand quantitatively how variations in device properties influence system throughput and utilization. Such information is useful for system architectural design and manufacturing yield optimization.