Creation of 3D Surface Models From 2D Layouts For BEM Analysis

摘要

In this paper we present a new approach to creation of 3D surface models of MEMS devices from 2D layout masks suitable for analysis using the Boundary Element Method (BEM). The algorithm is implemented as a part of the commercially available BEM based multi-physics solver AutoMEMS [2] and is responsible for automatically generating surface 3D models from a layout (GDSII or CIF) and a user supplied process description. The surface model is then automatically meshed for numerical analysis with 3D BEM solver.