APPLICATION OF ULTRAFINE PARTICLE DEPOSITION METHOD TO OVERLAY COATING

摘要

Overlay coating is expected to improve the characteristics of structural materials and, there have been many researches on it. However, there are problems still unsolved in overlay coatings. This study deals with basic research on Ultra-fine Particle Deposition method for applying it to overlay coating. In the method, ultra-fine particles are produced by material evaporation in an inert gas atmosphere, and then a film of the material is formed on the substrate by the deposition of the ultra-fine particles at high speed. We elucidated the effects of control parameters of the Ultra-fine Particle Deposition method to make titanium and aluminum films on a titanium substrate.