A Novel Spectrum Excitation Source- Microfabricated ICP Generator

机译：新型频谱激励源-微型ICP发生器

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摘要

A novel microfabricated inductively coupled plasma (micro-ICP) generator is introduced, which is a emission spectrum excitation source based on MEMS technology. The configuration, fabrication process, and properties of the plasma generator are described in detail. With the development of MEMS technology, the improvement and prospect of the plasma generator are presented.

机译：介绍了一种新型的微电感耦合等离子体发生器，它是一种基于MEMS技术的发射光谱激发源。详细描述了等离子体发生器的构造，制造过程和特性。随着MEMS技术的发展，提出了等离子体发生器的改进和前景。

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来源
《International Conference on Electronic Measurement amp; Instruments(ICEMI'2005) vol.3; 20050816-18; Beijing(CN)》|2005年|P.3.421-3.423|共3页
会议地点 Beijing(CN)
作者
Wang Yongqing; Ma Wen; Lou Jianzhong; Sun Rongxia; Wan Zhenzhen; Shi Ning; Wang Haizhou;
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作者单位

College of Electronic Informational Engineering, Hebei University. Hebei Baoding, 071002, China;

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原文格式 PDF
正文语种 eng
中图分类电气测量技术及仪器;
关键词
microfabricated ICP generator; planar spiral coil; MEMS technology; spectrometer;

机译：微型ICP发生器平面螺旋线圈MEMS技术光谱仪;

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专利

1. Self-Excitation of Autonomous Generators. Part 2. Study of Self-Excitation of an Asynchronous Generator Inclusive of the Starter in the Form of Residual Voltage on Excitation Capacitors [J] . A.-Z. R. Dzhendubaev, I. V. Chernykh Russian electrical engineering . 2018,第2期

机译：自主发电机的自励。第2部分。励磁电容器上残余电压形式的包括起动器在内的异步发电机的自励研究
2. Period Dependence of Response Spectrum Damping Modification Factors due to Source- and Site-Specific Effects [J] . Bradley Brendon A. Earthquake spectra . 2015,第2期

机译：源和站点特定效应引起的响应谱阻尼修正因子的周期依赖性
3. Discussion on Â¿Performance of dual-excitation synchronous generator at leading power factorsÂ¿, Â¿Dynamic performance of field-regulated synchronous machinesÂ¿ and Â¿Control of dual-excitation generator using derivatives of rotor angleÂ¿ [J] . Electrical Engineers, Proceedings of the Institution of . 1976,第9期

机译：讨论双励磁同步发电机在领先功率因数下的性能，现场调节同步电机的动态性能以及使用转子角导数控制双励磁发电机的性能
4. A Novel Spectrum Excitation Source- Microfabricated ICP Generator [C] . . 2005

机译：新型频谱激励源-微型ICP发生器
5. A Microfabricated Deuterium Ion Source for Compact Neutron Generators. [D] . Johnson, Benjamin Bargsten. 2013

机译：用于紧凑型中子发生器的超细氘离子源。
6. Microfabricated Collector-Generator Electrode Sensor for Measuring Absolute pH and Oxygen Concentrations [O] . Adam K. Dengler, R. Mark Wightman, Gregory S. McCarty -1

机译：用于测量绝对pH和氧气浓度的超细集电极电极传感器
7. Microfabricated Hollow Microneedle Array Using ICP Etcher [O] . Jing Ji, Francis E. H. Tay, Jianmin Miao 2008

机译：使用ICP蚀刻机的微型空心微针阵列
8. Rotational, Vibrational and Electronic Excitation of a Neutral Nitrogen Molecule in the ICP (Inductively Coupled Argon Plasma) [R] . Hasegawa, T., Winefordner, J. D. 1987

机译：ICp中的中性氮分子的旋转，振动和电子激发（感应耦合氩等离子体）

A Novel Spectrum Excitation Source- Microfabricated ICP Generator

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