FEMTOSECOND LASER TWO-PHOTON MICROFABRICATIONCONTROL AND MONITORING SYSTEM BASED ONVIRTUAL INSTRUMENTS

摘要

Femtosecond (fs) laser Two-photon Microfabrication is a newrntrue 3D microstructure fabricating method with sub-micronrnresolution power based on the characteristic of fs laser thatrnultrahigh peak intensity can be achieved at low pulse energy,rnand the photopolymerization induced by two-photon absorptionrncan be tightly confined in one limited focus. Accordingrnto the elementary idea of this fabricating method, a controlrnand monitoring system developed in the Virtual Instrumentsrnenvironment, LabVIEW, is proposed in this paper. In order tornensure the movement accuracy of the machining system thatrnis the crucial factor influencing the figure error of the final 3Drnmicrostructures, a micro displacement driver and positionrndata acquisition program is designed. Through the error compensation,rnthe minimum error of the actual processing trackrnfrom design track can be obtained. Based on machine visionrnconception, a vision monitoring system is used to acquire thernimage of the single polymerization layer, find the machiningrndefects and obtain the compensation data. Integral control andrnmonitoring system improves the machining accuracy and hasrnuser friendly interface.