Current status of InGaAs detector arrays for 1-3 um

摘要

Abstract: In$-x$/Ga$-1$MIN@x$/As detector linear arrays with 256 and 512 elements have been made for the 1.0 - 1.7 $mu@m spectrum (x $EQ 0.53) and 1.4 - 2.6 $mu@m (x $EQ 0.8) with 30 $MUL 30, 30 $MUL 100 and 25 $MUL 500 $mu@m pixel sizes. Room temperature D$+*$/ values beyond 1 $MUL 10$+13$/ W/cm-(Hz)$+1/2$/ (at 1.7 $mu@m) and 1 $MUL 10$+11$/ W/cm(Hz)$+1/2$/ (at 2.5 $mu@m) are reported. A 128 $MUL 128 element In(.53)Ga(.47)As detector array with less than 1% dropouts is also described. High reliability is also reported for these arrays. Future improvements needed include lower-noise multiplexers and the use of zero-bias multiplexers.!