CAPACITIVE SILICON NANOMECHANICAL RESONATORSCAPABLE OF SELECTIVE VIBRATION OF HIGH-ORDER MODE

摘要

This paper reports the high-order mode capacitive silicon resonators by placing the driving electrodes along the resonantbody. The fixed-fixed beam capacitive silicon resonators have been successfully fabricated. The evaluation results show that thehigher-order mode capacitive silicon resonator can achieve the lower insertion loss and smaller motional resistance over those oflower-order mode resonator.