Measurements Of Gas Temperature In Microwave Plasma At Atmospheric Pressure By Molecular Emission Spectrometry

摘要

N2 Air. The gas temperature increases slightly with the increase of microwave power, decreases slightly with the decrease of gas flow overall. The gas temperature of nitrogen and air microwave plasma plume reduces quickly along the axial direction. In order to verify the accuracy of molecular emission spectrometry, the thermocouple is used as a comparison to measure the temperature of the DBD argon plasma. Experiments show that the temperature measurement results of molecular emission spectrometry and thermocouple are very consistent.