Abstract: The morphological and compositional changes which take place during the laser irradiation of YBCO targets are discussed. The understanding of the evolution of target composition, will lead to better control of film quality. In the case stated here, a XeCl excimer laser was used to irradiate rotated and also non-rotated YBa$-2$/Cu$-3$/O$-7$MIN@x$/ targets. The modified surface of these targets was systematically studied by scanning electron microscopy and energy dispersive x-ray microanalysis. It was observed that some crucial deposition parameters, such as the number of pulses and fluence has a strong effect on the roughening of the target. A comparative study was done on the derived High-Tc superconducting thin films. It was shown that the conditions during the preablation procedure which affect the target surface morphology correlate closely with the appearance of laser droplets on the film surface. !12
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机译：摘要：探讨了YBCO靶材激光辐照过程中的形貌和组成变化。对靶成分演变的理解将导致更好地控制胶片质量。在这里所述的情况下，使用XeCl准分子激光照射旋转的和非旋转的YBa $ -2 $ / Cu $ -3 $ / O $ -7 $ MIN @ x $ /靶。通过扫描电子显微镜和能量色散X射线显微分析系统地研究了这些靶的改性表面。观察到一些关键的沉积参数，例如脉冲数和能量密度对靶的粗糙化有很大影响。对派生的High-Tc超导薄膜进行了比较研究。结果表明，在预烧蚀过程中，影响靶材表面形态的条件与膜表面上激光滴的出现密切相关。 ！12
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