Abstract: Machining characteristics of Fiber Reinforced Plastics (FRPs) using excimer laser have been examined at three wavelengths 193 (ArF), 248 (KrF), and 308 (XeCl) nm in the fluence ranges up to 80 J/cm$+2$/. At 308 nm, a maximum removal rate was measured to be as high as 15 $mu@m/pulse for the plastics with glass fiber and epoxy matrix (glass/epoxy). Irrespective of fibers and matrix materials, removal rates increased with applying a longer laser wavelength. Complementary studies were also conducted on glass/epoxy at 308 nm to examine the effect of purge gases (He, N$-2$/, Ar) to the irradiated area. It was found that Ar and N$- 2$/ were effective for improvement of the kerf quality and reduction of sooty debris around the irradiated area. !6
展开▼
