On-machine Profile and Straightness Measurement of a Linear Slide

摘要

In this paper, a new system is proposed to measure the straightness error of a precision lienar slide under on-machine conditions. Precision slides play an important role in machine tools and measuring machines. In precision turning machines, the workpiece is held in position by the spindle while the moving table carries the cutting tool. In order to enhance the performance of these amchiens, it is necesary to measure the motion errors of the tool or the table and correct these errors by means of a fast piezoartuator. In active error compensation (AEC), the motion errors of the table are determined on-line and fed to the cotnroller for correction. Here, if the profiel is known exactly, the moiton error can be obtained simply by subtracting the peofile data from the output of a displacement sensor.