Micro Machine Parts Fabricated from Aqueous Based Stainless Steel Slurry

摘要

A fabrication process of stainless steel micro components from metallic powder is reported. The process consists of two stages. In the first stage, high quality SU-8 master moulds and their negative replicas from soft moulds are produced using photolithography and soft moulding techniques respectively. The second stage includes preparation of stainless steel slurry, filling the soft mould, obtaining the green parts, de-binding and sintering to the finial parts. A method is proposed in this research to obtain the optimum dispersant for preparation of the metallic slurry and the result was found to be 0.003 (dispersant/powder wt.). Both vacuum and forming gas atmosphere sintering conditions were investigated. The results show micro components have the similar high quality as the master moulds. The maximum sintered density was found to be 98.1% when the sample was sintered at 1,350 ℃ in vacuum.