Compensation for Temperature Dependency of 1D Position Sensitive Detector

摘要

PSDs are used for fast and precise beam position measurements in various applications such as scanner charac-terization and scanning probe microscopy. However, PSDs suffer from systematic position sensing errors at hightemperatures, limiting the possible application elds for usage of PSDs. This paper investigates temperaturedependency of PSDs and its compensation that enables the usability of PSDs in high temperature applicationsabove 60 ℃. The proposed compensation scheme is explained by the diode leakage current model, which isextended to the given semiconductor device structure of the PSD. For the validation of the proposed method,an experimental PSD characterization setup has been used, showing that the proposed temperature compen-sation scheme reduces the temperature-induced relative position sensing error from 44.7 % down to 0.2 % fortemperatures up to 95 ℃.