Impurity Diagnostics in Low Pressure Discharge Lamps using Atomic Molecular Emission Spectroscopy

摘要

The current studies have demonstrated the value of emission analysis in the diagnostics of abnormal lamp behaviour in low pressure deuterium lamps. The methodology is believed to be of value in studies of other low pressure discharge lamp types. The development of rapid, computer based spectral analysis techniques makes manageable the task of analysing thousands of emission lines in times compatible with off-line analysis techniques. In situations where interest is limited to emissions, known from prior work to be associated with particular lamp behaviour, then the technique may be considered for use as an on-line technique during the early stages of lamp processing and burn in. Important issues relating to the instrumentation, analysis procedures and the spectroscopic data that combine to make it possible to exploit the technique, in a more general fashion to the diagnostics of low pressure discharge lamps than has been reported to date, are discussed in an Invited Lecture at the LS:10 Symposium.