Design aspects of Waveguide Hybrid Advanced MEMS(WHAM)

摘要

Three different versions of high numerical aperture (NA_i =1.9) 0.3° field diffraction limited WHAM lens systems are designed for hi-density data storage by using over-hemi-cylinder surfaces. A prototype WHAM lens with NA_i =1.23 is also discussed. Detail of unique tolerance issue is presented.