Analysis of microwave properties of coplanar strips of MQW Mach-Zehnder modulator with finite metallization thickness and conductivity

摘要

A novel structure of GaAs/GaAlAs multi-quantum well (MQW) traveling wave (TW) Mach-Zehnder modulator (MZM) with coplanar strips is proposed. This device uses n~+ heavy doped layer to obtain velocity match. Then the Method of Lines is applied to characterize the influence of metallization thickness and conductivity loss on the velocity match and impedance match. With optimum parameters of the structure, the bandwidth over 80GHz is obtained.