Theoretical Backgrounds of Methods of Angle-Resolved and Total Integral Scattering for Precise Dielectric Surfaces

摘要

Theoretical models of light scattering methods are considered for precise dielectric surfaces. By use of microscopic treatment it is shown, that polarization of near-surface medium in the presence of roughness differs from that in the volume of medium. Simple theoretical model of near-surface polarization dependence due to effective field difference is presented for the case of s-polarized incident light. Corresponding light scattering is calculated by use of quasi-microscopic approach. It is shown that the intensity of scattering decreases noticeably for very smooth surfaces, which height deviations are compared with interatomic distance (～ 5 A for SiO_2 ) . Therefore the differences of power spectral density functions measured by angle-resolved scattering and atomic force microscopy methods may be qualitatively explained.