Beam shaping with high NA cylindrical vector beams illumination in SIL systems

摘要

In solid immersion lens (SIL) system, both propagating waves and evanescent waves contribute to the total field strength with different properties. By using diffractive optical element to modify the cylindrical vector incident beam, we study how the field strength changes when propagating (evanescent) waves are balanced against each other and the evanescent (propagating) waves dominate the field strength. The simulation results show that for radially polarized incident beam, the rate of slope of axial field strength v.s transverse field strength by evanescent waves contribution is greater than that by propagating waves contribution. With general cylindrical vector incident beams, increasing φ_0 (the rotation angle of polarization from the radial direction) will also make the axial field strength decrease while the variation of the transverse field strength is small. These methods can be used to control the aspect ratio of three dimensions storage dot, which may find applications in near field optical data storage system.