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Surface characterisation via optical diffraction

机译:通过光学衍射表征表面

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Abstract: Through the consideration of a surface as a reflective phase grating, this paper establishes the various relationships between the statistical parameters of the surface topography and the far- field diffraction pattern. These relationships have been incorporated into Talyfine, a new measuring instrument designed primarily for the measurement of flats and cylinders. The performance of this instrument is compared against established stylus-based surface texture measuring instruments, Talystep and Form Talysurf.!4
机译:摘要:通过将表面视为反射型相位光栅,本文建立了表面形貌的统计参数与远场衍射图之间的各种关系。这些关系已被并入Talyfine,这是一种新的测量仪器,主要用于测量平板和圆柱体。将该仪器的性能与已建立的基于触控笔的表面纹理测量仪器Talystep和Form Talysurf进行比较!4

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